| 摘要 |
A method of producing particles containing metal oxide for use in semiconductor devices may include heating metal-containing particles in a flame produced by a mixture of oxygen and a fuel component comprising at least one combustible gas selected from hydrogen and hydrocarbons. The oxygen may be present in the mixture in a proportion of not less than 10 mole % below, and not more than 60 mole % above, a stoichiometric amount relative to the fuel component, so as to oxidize metal in at least an outer shell of the particles. The method may include cooling the oxidized particles by feeding them into a liquid, collecting the cooled oxidized particles; and providing a distance between entry of the particles into the flame and collection of the particles of at least 300 mm. |
