发明名称 EXPOSURE EQUIPMENT
摘要 <p>[Problem] To provide exposure equipment capable of preventing speckle from standing out in an optical image formed on a photosensitive medium, and effectively suppressing the occurrence of unevenness in the brightness within a prescribed region. [Solution] The exposure equipment (10) is provided with an optical element (50), a lighting device (60), and a spatial light modulator (30). Using a scanning device (65), coherent light is scanned across a hologram recording medium (55), and the coherent light coming from the hologram recording medium (55) irradiates the spatial light modulator (30), which overlaps with a prescribed region (LZ). In addition, a photosensitive medium (15) is positioned adjacent to the spatial light modulator (30); hence, using a very simple configuration, it is possible to guide coherent light to the photosensitive medium (15) without causing speckle to stand out.</p>
申请公布号 WO2012070651(A1) 申请公布日期 2012.05.31
申请号 WO2011JP77216 申请日期 2011.11.25
申请人 DAI NIPPON PRINTING CO., LTD.;ISHIDA KAZUTOSHI;KURASHIGE MAKIO;TAKANOKURA TOMOE;OOYAGI YASUYUKI 发明人 ISHIDA KAZUTOSHI;KURASHIGE MAKIO;TAKANOKURA TOMOE;OOYAGI YASUYUKI
分类号 H01L21/027;G02B19/00;G02B26/10 主分类号 H01L21/027
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