摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sputtering target containing the combination of oxides which forms a recording layer of high definition and high recording density, and a recording material of a hard disk. <P>SOLUTION: The sputtering target basically comprises an alloy of cobalt-platinum (CoPt), cobalt-chrome-platinum (CoCrPt) or cobalt-chrome-platinum-boron (CoCrPtB), wherein silica oxide (SiO<SB POS="POST">2</SB>) and Cr<SB POS="POST">2</SB>O<SB POS="POST">3</SB>are added as an oxygen supplier during sputtering process to donate oxygen to the oxygen defects, and wherein the amount of silica oxide (SiO<SB POS="POST">2</SB>) ranges from 4 to 8 atom% and the amount of chromium oxide (Cr<SB POS="POST">2</SB>O<SB POS="POST">3</SB>) ranges from 0.8 atom% to 5 atom%. <P>COPYRIGHT: (C)2012,JPO&INPIT |