POSITIVE BOTTOM PHOTOIMAGEABLE ANTIREFLECTIVE COATING

摘要

PROBLEM TO BE SOLVED: To provide a positive bottom photoimageable antireflective coating composition which is capable of being developed in an aqueous alkaline developer.

SOLUTION: The antireflective coating composition comprises: a polymer comprising at least one recurring unit with a chromophore group and at least one recurring unit with a hydroxyl and/or a carboxyl group; a vinyl ether terminated crosslinking agent; and optionally, a photoacid generator and/or an acid and/or a thermal acid generator. The invention further relates to a process for using such a composition.

COPYRIGHT: (C)2012,JPO&INPIT