| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a charge plate monitor capable of evaluating performance of an ionizer, applicable to even a long ionizer for a large-sized object to be electrostatically discharged such as a liquid display substrate. <P>SOLUTION: A charge plate monitor detects positive or negative ions generated by an ionizer with a measuring plate to evaluate electrostatic discharge performance of the ionizer and ion balancing performance between positive and negative ions. The charge plate monitor has one instrument body 100 provided with a function of measuring the attenuation time required for the predetermined potential applied to the measuring plate to attenuate to a predetermined value by the ions and a function of measuring ion balance based on the potential of the measuring plate. The number of measuring plates 201, 202, and 203 are provided in accordance with the length of the ionizer 300 to be evaluated. The measuring plates 201, 202, and 203 are connected to the instrument body 100 in parallel or in series. <P>COPYRIGHT: (C)2012,JPO&INPIT |
