| 发明名称 |
ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE |
| 摘要 |
An electrostatic chuck device including: a plurality of adsorption areas having an electrode generating electrostatic attractive force; and a control portion controlling the electrostatic attractive force against each of the plurality of the adsorption areas independently of other adsorption areas. |
| 申请公布号 |
US2012134065(A1) |
申请公布日期 |
2012.05.31 |
| 申请号 |
US201113305139 |
申请日期 |
2011.11.28 |
| 申请人 |
FURUYA AKIRA;KITAMURA TAKAMITSU;SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
FURUYA AKIRA;KITAMURA TAKAMITSU |
| 分类号 |
H01L21/687;H01L21/50 |
主分类号 |
H01L21/687 |
| 代理机构 |
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| 主权项 |
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| 地址 |
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