发明名称 THIN-FILM TRANSISTOR CIRCUIT BOARD AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a thin-film transistor circuit board capable of reducing manufacturing costs and a method of manufacturing the thin-film transistor circuit board. <P>SOLUTION: A thin-film transistor circuit board includes: an oxide semiconductor thin film having a channel region, a source region and a drain region, the source region and a drain region being formed on each side of the channel region; a first capacitance forming section being formed of the same material as that of the oxide semiconductor thin film and having a first low resistance section and a second low resistance section; a gate insulating film being formed over the channel region of the oxide semiconductor thin film and over the first low resistance section of the first capacitance forming section and exposing the source region and the drain region of the oxide semiconductor thin film and the second low resistance section of the first capacitance forming section. The length L1 of the channel region between the source region and the drain region in the oxide semiconductor thin film is shorter than the length L2 from an end portion on which the gate insulating film is formed to the second low resistance section in the first capacitance forming section. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012104566(A) 申请公布日期 2012.05.31
申请号 JP20100250018 申请日期 2010.11.08
申请人 TOSHIBA MOBILE DISPLAY CO LTD 发明人 ISHIDA ARICHIKA;MATSUURA YUKI;SASAKI ATSUSHI
分类号 H01L29/786;G02F1/1368;G09F9/30;H01L21/336 主分类号 H01L29/786
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