| 摘要 |
<P>PROBLEM TO BE SOLVED: To transport and assemble a divided upper tank maintaining the upper tank in a clean state. <P>SOLUTION: A transportation assembly method includes a step (S110) in which first transportation covers, facing undivided side wall parts, are attached to inner wall parts of a ceiling part which continue into divided surfaces and a step (S120) in which second transportation covers, facing the ceiling part, are attached to lower surfaces of the side wall parts. Further, the transportation assembly method includes a step (S130) in which a first upper tank and a second upper tank are respectively transported with closed spaces sealed and a step (S150) in which the first upper tank and the second upper tank are joined to each other with the divided surface of the first upper tank and the divided surface of the second upper tank closely contacted after the above transportation step. Furthermore, the transportation assembly method includes a step (S160) in which the first upper tank and the second upper tank which are joined to each other are transported to the interior of a clean room after the above joining step and a step (S170) in which the first transportation cover and the second transportation cover are removed in the clean room. <P>COPYRIGHT: (C)2012,JPO&INPIT |
