| 摘要 |
<P>PROBLEM TO BE SOLVED: To stabilize power supply voltage when simultaneously measuring a plurality of devices under test. <P>SOLUTION: A test device 2a simultaneously tests a plurality of DUT 1. A common main power supply 10 supplies power to a power supply terminal P1 of the plurality of DUT 1. A power supply compensation circuit 20 includes a switch element which is controlled according to a control signal S<SB POS="POST">CNT</SB>, injects a compensation pulse current I<SB POS="POST">CMP</SB>into the power supply terminals P1 of the plurality of DUT 1, and/or pulls the compensation pulse current I<SB POS="POST">CMP</SB>into a different path from the plurality of DUT 1. For example, a pattern generator PG produces a common test patten S<SB POS="POST">PTN</SB>to the plurality of DUT 1. The pattern generator PG changes a control pattern S<SB POS="POST">PTN_CMP</SB>according to the number of the DUT 1 so as to produce the compensation pulse current I<SB POS="POST">CMP</SB>of amount proportional to the number of the DUT 1 under operation. <P>COPYRIGHT: (C)2012,JPO&INPIT |
