DEFECT INSPECTING DEVICE AND DEFECT INSPECTING METHOD USING SAME

摘要

The present invention pertains to a defect inspecting device, which comprises: a first optical unit for collimating each pair of rays so as to irradiate the same to an inspection position of an object to be inspected, wherein the pair of rays overlap each other at the edges thereof so that the overlapped areas is irradiated to the inspection position, a second optical unit for collimating each pair of rays so as to irradiate the same to the inspection position, wherein the pair of rays overlap each other at the edges thereof so that the overlapped area is irradiated to the inspection position; a control section for controlling the first optical unit and the second optical unit to be lighted alternately; and a camera for photographing the image of the inspection position using the incident light which is irradiated from the first optical unit or the second optical unit and then reflected from the inspection position.