| 摘要 |
PURPOSE: A post-processing method of liquid residue from direct composition of organo chlorosilane is provided to simplify pyrolysis method and prevents from solid deposit being precipitated in reactor walls. CONSTITUTION: A post-processing method of liquid residue from direct composition of organo chlorosilane requires a pyrolysis method in order to obtain silane. The pyrolysis method comprises a step of thermally decomposing hydrogen chloride in fluidized bed consisting of silicon dioxide containing aluminum particles. The pyrolysis method decomposes disilane which is represented by general formula of RcCl6-cSi 2(here, C indicates 0-6, and R indicates alkyl). The silicon dioxide containing aluminum particles is quartz, ceramics, and pickling or calcinated sand. |
