| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a transmission electron microscope apparatus capable of acquiring a spectral image simultaneously from a plurality of samples and measuring a highly accurate chemical shift form an electronic energy loss spectrum extracted from the spectral image, a sample holder, a sample stage, and a method of acquiring the spectral image. <P>SOLUTION: This transmission electron microscope apparatus 1 includes an electron gun for emitting electron beams 3, a conversion lens 4 for converging the emitted electron beams, a plurality of sample stages to which the converged electron beams are emitted and on which samples 18, 19 are disposed, a sample movement control device for moving the sample stages, an imaging lens 7 for imaging the electron beams transmitted through a plurality of the samples, an electron spectroscope 8 for acquiring the spectral image simultaneously from a plurality of the samples by spectrally diffracting the electron beams by the amount of energy of the imaged electron beams to output the spectral image in which a convergence position on an energy dispersion axis is made different from that in a direction perpendicular to the energy dispersion axis, and an image display device 14 for displaying the acquired spectral images. <P>COPYRIGHT: (C)2012,JPO&INPIT |
