发明名称 METHOD OF REMOVING NANOCRYSTALS
摘要 A method for forming a semiconductor structure includes providing a semiconductor layer, forming nanocrystals over the semiconductor layer, and using a solution comprising pure water, hydrogen peroxide, and ammonium hydroxide to remove at least a portion of the nanocrystals. A ratio by volume of pure water to ammonium hydroxide of the solution may be equivalent to or less than a ratio by volume of 10:1 of pure water to ammonium hydroxide when ammonium hydroxide has a concentration of 29% ammonia by weight. The step of using the solution to remove the at least a portion of the nanocrystals may be performed at a temperature of 50 degrees Celsius or more.
申请公布号 US2012135596(A1) 申请公布日期 2012.05.31
申请号 US20080022800 申请日期 2008.01.30
申请人 KANG SUNG-TAEG;SHEN JINMIAO J. 发明人 KANG SUNG-TAEG;SHEN JINMIAO J.
分类号 H01L21/28;H01L21/31 主分类号 H01L21/28
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