发明名称 |
DAMAGED SUBSTRATE HANDLING APPARATUS AND METHOD FOR SUBSTRATE PROCESSING SYSTEMS |
摘要 |
Embodiments of the invention generally provide apparatus and methods of handling a damaged substrate in substrate processing systems, such as screen printing systems for solar cell devices. The damaged substrate handling apparatus includes a container mounted centrally on a rotary actuator assembly. A plurality of substrate supports are arranged around the periphery of the rotary actuator assembly. Damaged substrates are transferred to the container from the substrate supports. Both automated and manual apparatus and methods are disclosed. |
申请公布号 |
US2012136476(A1) |
申请公布日期 |
2012.05.31 |
申请号 |
US200913382992 |
申请日期 |
2009.10.07 |
申请人 |
BACCINI ANDREA;GALIAZZO MARCO;APPLIED MATERIALS, INC. |
发明人 |
BACCINI ANDREA;GALIAZZO MARCO |
分类号 |
H01L21/687;G06F17/00 |
主分类号 |
H01L21/687 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|