发明名称 |
COATING APPARATUS AND COATING METHOD |
摘要 |
In applying a coating liquid including a solute and a solvent onto a given area on a substrate so as to allow the coating liquid to be solidified on the substrate by volatizing the solvent, an atmosphere in a vicinity of a coated area of the substrate is kept under an atmosphere that reduces volatilization of the solvent until applying the coating liquid onto the given area of the substrate is finished. |
申请公布号 |
US2012135135(A1) |
申请公布日期 |
2012.05.31 |
申请号 |
US201213365973 |
申请日期 |
2012.02.03 |
申请人 |
SAKURAI NAOAKI;SATO TSUYOSHI;IKAGAWA MASAKUNI;KABUSHIKI KAISHA TOSHIBA |
发明人 |
SAKURAI NAOAKI;SATO TSUYOSHI;IKAGAWA MASAKUNI |
分类号 |
B05D5/12 |
主分类号 |
B05D5/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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