发明名称 |
RESONANT BIAXIAL ACCELEROMETER STRUCTURE OF THE MICROELECTROMECHANICAL TYPE |
摘要 |
<p>A microelectromechanical detection structure (1; 1') for a MEMS resonant biaxial accelerometer (16) is provided with: an inertial mass (2; 2'), anchored to a substrate (30) by means of elastic elements (8) in such a way as to be suspended above the substrate (30), the elastic elements (8) enabling inertial movements of detection of the inertial mass (2; 2') along a first axis of detection (x) and a second axis of detection (y) that belong to a plane (xy) of main extension of said inertial mass (2; 2'), in response to respective linear external accelerations (ax, ay); and at least one first resonant element (10a) and one second resonant element (10b), which have a respective longitudinal extension, respectively along the first axis of detection (x) and the second axis of detection (y), and are mechanically coupled to the inertial mass (2; 2') through a respective one of the elastic elements (8) in such a way as to undergo a respective axial stress (N1, N2) when the inertial mass moves respectively along the first axis of detection (x) and the second axis of detection (y).</p> |
申请公布号 |
WO2012070021(A1) |
申请公布日期 |
2012.05.31 |
申请号 |
WO2011IB55309 |
申请日期 |
2011.11.25 |
申请人 |
STMICROELECTRONICS S.R.L.;POLITECNICO DI MILANO;COMI, CLAUDIA;CORIGLIANO, ALBERTO;SIMONI, BARBARA |
发明人 |
COMI, CLAUDIA;CORIGLIANO, ALBERTO;SIMONI, BARBARA |
分类号 |
G01P15/097;G01P15/18 |
主分类号 |
G01P15/097 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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