DEVICE FOR ANALYSING THE TOPOGRAPHY OF A SURFACE OF A SUBSTRATE

摘要

A device for analyzing the topography of a surface (2) of a substrate (1) travelling on a substantially planar course with axes X, Y and Z defining an orthonormal frame of reference of the space. The surface (2) is substantially parallel to the plane XY. A device (10) for structured lighting of the surface (2) engages with a device (20) for measuring light backscattered by the surface (2) in order to analyze topography of the surface(2) during travel of the substrate (1). The lighting device (10) projecting a light beam (F) with an angle of incidence ‘a’ onto the surface (2), to form a plurality ‘n’ of luminous streaks (S1, S2, . . . Sn) thereon. Each luminous streak (S) forms an angle ‘b’ with the axis X1. The measurement device (20) includes a linear camera located in a plane P secant to the plane XY and the plane XZ, the intersection of the plane P with the plane XY forming angles.