| 摘要 |
PURPOSE: An imprint device is provided to prevent stain by bonding a substrate and the stamp. CONSTITUTION: An imprint device comprises a chamber unit(2), a stage(4), a holder(6), and a floating press unit(10). The chamber part has a chamber(C). The stage is arranged inside the chamber of the chamber part. The substrate(G) is placed on the stage. The holder holds a stamp(S) in a state pressable with the substrate above the stage. The substrate is attached with the stamp in order for the substrate on the stage not to contact with the stage.
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