| 摘要 |
PURPOSE: A method for testing a substrate is provided to improve reliability of integrated height data by arranging a plurality of height data of remaining projection units based on a projection unit in which reliability is highest. CONSTITUTION: A stage(140) supports and transfers a substrate in which a measurement object is formed. A plurality of projection units(110) irradiates the substrate with pattern illumination. The plurality of projection units comprises a light source, a grid element, a grid transfer tool, and a projection lens. The light source generates light. The grid element changes the light generated in the light source into the pattern illumination. The grid transfer tool transfers the grid element. The projection lens projects the pattern illumination to the measurement object. A camera(130) takes a photograph of an image of the substrate. A lighting unit(120) is installed to be adjacent to the stage and irradiates the substrate with illumination.
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