| 摘要 |
PURPOSE: A charged particle beam drawing apparatus and a drawing method thereof are provided to resize a figure in the drawing apparatus by providing resizing information to inputted drawing data. CONSTITUTION: A plurality of figures is defined in a memory part(140). The memory part stores drawing data. A determination part(56) determines a resizing direction and a resizing state of each figure. A resizing process part(58) resizes the figure in the determined resizing direction. A drawing part(150) draws a pattern of the figure on a sample using the resized figure.
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