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发明名称
SUBSTRATE STORING CONTAINER
摘要
申请公布号
EP1724474(A4)
申请公布日期
2012.05.30
申请号
EP20050720367
申请日期
2005.03.09
申请人
SHIN-ETSU POLYMER CO., LTD.
发明人
TODA, JUNYA;NAKAYAMA, TAKAYUKI
分类号
B65D85/86;F16B39/282;F16B35/06;F16B39/24;F16B43/00;H01L21/673;H01L21/68
主分类号
B65D85/86
代理机构
代理人
主权项
地址
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