METHOD FOR INSPECTING SUBSTRATE

摘要

PURPOSE: A substrate inspecting method is provided to enhance the reliability of integrated height data by performing an alignment with respect to a plurality of projection units by using height data when integrating the height data of the plurality of projection units. CONSTITUTION: A substrate inspecting method is as follows. Pattern light is successively radiated to a substrate where a measurement object is formed through a plurality of projection units. Phase data per the each projection unit with respect to the substrate are obtained(S110). Height data per the each projection unit with respect to the substrate are extracted by using the phase data per the each projection unit(S120). An inclination of the extracted height data per is corrected by using the height data per the each projection unit(S130). The height data per the each projection unit in which the correction of the inclination is completed are aligned(S140). The integrated height data is extracted by using the aligned height data(S150).