| 摘要 |
PURPOSE: A transferring unit is provided to perfectly prevent a penetration of foreign materials into a gap between slide cover parts by a closing unit and side cover member. CONSTITUTION: A transferring unit(100) comprises a table frame(110), a transferring table(120), a closing unit(170), and a connecting member(125). The transferring table supporting an object(101) is arranged in the upper part of the table frame and moved along a longitudinal direction of the table frame with respect to the table frame. The transferring part is arranged between the table frame and transferring table and moves the transferring table along a longitudinal direction. The closing unit is arranged between the transferring unit and transferring table to enclose the transferring unit along a longitudinal direction. The connecting member is arranged between the closing unit and transferring unit. The connecting unit connects the transferring unit and transferring table to be moved with the transferring table.
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