| 摘要 |
<p>An imaging apparatus comprising:
An imaging sub-assembly, in which an electron microscope is arranged to acquire an image of a sample that can be located in a sample holder, said image being acquired using an imaging beam that can be switched so as to
produce a flash of imaging electrons,
wherein the apparatus additionally comprises:
A locating sub-assembly, which does not employ electron microscopy, and which can be employed to determine a location of the sample relative to the imaging beam. The field of detection of the locating sub-assembly may be substantially coincident with the field of view of the imaging sub-assembly, allowing concurrent locating/imaging of the sample. Alternatively, in the case of a moving sample caused to flow through the sample holder, said field of detection may be located "upstream" of said field of view, and a processor can be used to calculate the commencement time of an imaging flash using data that comprise the relative displacement of said fields and the velocity of the sample.</p> |
