| 摘要 |
<p>A piezoelectric actuator device is provided. The piezoelectric actuator device includes asubstrate comprising an anchor region; a support beam arrangement having a first end and a second end, wherein the first end is mechanically fixed to the anchor region, the support beam arrangement extends from its first end to its second end and the second end is freely suspended; a first beam having a first end and a second end, wherein the first endof the first beam is mechanically fixed to at least a part of the second end of the support beam an-angement and the second end of the first beam is freely suspended; a second beam having a first end and a second end, wherein the first end of the second beam is mechanically fixed to at least a part of the second end of the support beam arrangement and the second end of the second beam is freely suspended; a coupling beammechanically coupling the second end of the first beam and the second end of the second beam; wherein the first beam and the second beam are arranged such that the first end of the support beam arrangement is located between the coupling beam and the second end of the support beam arrangement.Figure 1</p> |
