| 发明名称 |
A SWITCHING DEVICE AND A METHOD FOR FORMING A SWITCHING DEVICE |
| 摘要 |
<p>A SWITCHING DEVICE AND A METHOD FOR FORMING A SWITCHING DEVICE AbstractEmbodiments provide a switching device. The switching device includes a substrate which includes a contact region. The switching device further includes a vertical layer arrangement extending from the substrate next to the contact region. The vertical layer arrangement includes a control layer. The switching device further includes a freestanding silicon cantilever extending vertically from the contact region.FIG. 2 (a)</p> |
| 申请公布号 |
SG180162(A1) |
申请公布日期 |
2012.05.30 |
| 申请号 |
SG20110082401 |
申请日期 |
2011.11.03 |
| 申请人 |
AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH |
发明人 |
NG JIAQIANG ELDWIN;TSAI MING LIN JULIUS;NAVAB SINGH;SHEN NANSHENG |
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