Mechanical device for transmitting torque to generate multi-degree-of-freedom rotation

摘要

A mechanical device for transmitting a torque so as to generate a multi-degree-of-freedom rotation is provided. The mechanical device is used for clipping specimens during a vacuum sputtering process. The mechanical device includes an immovable frame, a first and a second shafts and a first and a second connecting elements. The immovable frame fastens the mechanical device, and includes a first hole and a first sleeve, which is disposed in the first hole and has a first transmission element. The first shaft is disposed inside the first hole and the first sleeve, and has a second hole. The second shaft is disposed in the second hole, and is perpendicular to the first shaft.