发明名称 PATTERN FORMING DEVICE
摘要 PURPOSE: A pattern forming device is provided to enhance convenience while accurately forming a pattern. CONSTITUTION: A supporting table has a plurality of supporting parts which are arranged at a constant interval along a circumferential direction. A rotary driving means supports the supporting table which can be rotate. A position detection means detects location of a work supported to the supporting table. A control unit creates fabrication coordinate data based on position detection of a work. The fabrication coordinate data is revised by discrete correction data which is established in advance at every supporting part. A fabrication unit(30) forms a pattern based on the fabrication coordinate data after correction.
申请公布号 KR20120053947(A) 申请公布日期 2012.05.29
申请号 KR20110103984 申请日期 2011.10.12
申请人 MATSUSHITA TOSHIO 发明人 MATSUSHITA TOSHIO
分类号 H01L21/677;B65G49/06;H01L21/027;H01L21/68 主分类号 H01L21/677
代理机构 代理人
主权项
地址