| 发明名称 |
METAL COMPLEX COMPRISING ?-DIKETONATO AS LIGAND |
| 摘要 |
To provide a metal complex compound capable of being suitably used for manufacturing a metal-containing thin film by the CVD method and a method for preparing a metal-containing thin film. A metal complex compound comprising a beta-diketonato ligand having an alkoxyalkyl-methyl group, and a method for preparing a metal-containing thin film using the metal complex compound by the CVD method.
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| 申请公布号 |
KR101144688(B1) |
申请公布日期 |
2012.05.29 |
| 申请号 |
KR20067021331 |
申请日期 |
2005.03.15 |
| 申请人 |
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发明人 |
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| 分类号 |
C07C49/92;C07F1/08;C07F3/00;C07F3/02;C07F3/04;C07F3/06;C07F5/00;C07F5/06;C07F7/00;C07F7/22;C07F7/24;C07F7/28;C07F9/00;C07F11/00;C07F13/00;C07F15/04;C07F15/06;C23C16/18;H01L21/285 |
主分类号 |
C07C49/92 |
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