MANUFACTURING METHOD FOR TRICHLOROSILANE

摘要

PURPOSE: A method for manufacturing trichlorosilane is provided to obtain plenty of trichlorosilane by using a catalyst on which the pre-set amount or more of silicon is deposited. CONSTITUTION: A reactor(100) is filled with a catalyst(150). Trichlorosilane and hydrogen are provided into the reactor. One of monosilane, silane monochloride, and silane bichloride is provided into the reactor while the reaction of the trichlorosilane and the hydrogen. One of the monosilane, the silane monochloride, and the silane bichloride is repeatedly provided into the reactor by a pre-set time interval. One of the monosilane, the silane monochloride, and the silane bichloride is stopped from being provided, and the amount of silicon is reduced.