System and method of applying horizontally oriented arc-lamps in ellipsometer or the like systems
摘要
Control of the angle-of-incidence of a beam of electromagnetic radiation provided by a horizontally oriented arc-lamp in ellipsometer, polarimeter, spectrophotometer, reflectometer, Mueller matrix measuring, or the like systems.
申请公布号
US8189193(B1)
申请公布日期
2012.05.29
申请号
US20090589076
申请日期
2009.10.19
申请人
LIPHARDT MARTIN M.;HE PING;WELCH JAMES D.;J.A. WOOLLAM CO., INC.