发明名称 System and method of applying horizontally oriented arc-lamps in ellipsometer or the like systems
摘要 Control of the angle-of-incidence of a beam of electromagnetic radiation provided by a horizontally oriented arc-lamp in ellipsometer, polarimeter, spectrophotometer, reflectometer, Mueller matrix measuring, or the like systems.
申请公布号 US8189193(B1) 申请公布日期 2012.05.29
申请号 US20090589076 申请日期 2009.10.19
申请人 LIPHARDT MARTIN M.;HE PING;WELCH JAMES D.;J.A. WOOLLAM CO., INC. 发明人 LIPHARDT MARTIN M.;HE PING;WELCH JAMES D.
分类号 G01J4/00 主分类号 G01J4/00
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