APPARATUS FOR CHUCKING SUBSTRATE

摘要

PURPOSE: A substrate chucking device is provided to simplify an apparatus for processing a substrate by stably supporting the substrate with a mask and to support the substrate to be steadily transferred. CONSTITUTION: A substrate comprises a first flat board(110), a second flat board(130), and a third flat board(150). The third flat board is arranged between the first flat board and the second flat board. The second flat board is separated from the first flat board. A vacuum groove(115) is formed on one side of the first flat board and sticks the substrate to one side of the first flat board. A connection hole passes through the first flat board and the second flat board and is communicated with the vacuum groove. A supporting member supports the first flat board from the second flat board.