发明名称 |
Hot cathode and ion source including the same |
摘要 |
A hot cathode includes: a hollow external conductor; a hollow internal conductor which is placed coaxially inside the external conductor; and a connection conductor which electrically connects tip end portions of the conductors. A heating current is folded back through the connection conductor to flow in opposite directions in the external conductor and the internal conductor. |
申请公布号 |
US8188645(B2) |
申请公布日期 |
2012.05.29 |
申请号 |
US20090511660 |
申请日期 |
2009.07.29 |
申请人 |
MIYAMOTO NAOKI;NISSIN ION EQUIPMENT CO., LTD. |
发明人 |
MIYAMOTO NAOKI |
分类号 |
H01J9/02 |
主分类号 |
H01J9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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