发明名称 Light-blocking layer sequence having one or more metal layers for an integrated circuit and method for the production of the layer sequence
摘要 In an integrated circuit, a light sensitive area is protected against radiation by arranging a light blocking layer sequence (504) on top of the light sensitive area. The light blocking layer sequence comprises one or several metal layers (504a) and a silicon layer (503b, 1) for the purpose of absorption. A moth eye structure is provided on the silicon layer. Thereby, a radiation incident by reflection is minimized in such a way that also stray light can effectively be kept from the light sensitive area below the light blocking layer sequence (504).
申请公布号 US8187908(B2) 申请公布日期 2012.05.29
申请号 US20080740554 申请日期 2008.10.30
申请人 GAEBLER DANIEL;X-FAB SEMICONDUCTOR FOUNDRIES AG 发明人 GAEBLER DANIEL
分类号 H01L21/00 主分类号 H01L21/00
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