ROBOT DEVICE AND CONTROL METHOD THEREOF

摘要

PURPOSE: A robot device for manufacturing a substrate manufacture and a control method thereof are provided to miniaturize a process chamber by preventing remaining substrates to interfere the inner wall of the process chamber in case of taking out only a part of substrates in the process chamber. CONSTITUTION: A robot device comprises an arm device(10), a plurality of hand devices(20A, 20B), and a controller(30). A stylobate of the arm device is supported in a standard point established on a predetermined location within a horizontal plane by rotary material. A free end of the arm device performs rectangular coordinates operation within the horizontal plane. Each support end of the plurality of hand devices performs the rectangular coordinates operation within the horizontal plane. The controller drives the arm device and the plurality of hand devices.