APPARATUS FOR MEASURING OF CLAMP PREASURE

摘要

PURPOSE: A clamp pressure measuring device is provided to precisely measure pressure with which a clamp pressurizes a substrate. CONSTITUTION: A sensor unit(121) senses pressure made by a clamp. A circuit unit(126) generates a sensing signal corresponding to pressure applied to the sensing unit. A data display unit(127) receives the sensing signal from the circuit unit. The data display unit displays pressure made by the clamp using the inputted sensing signal. The sensor unit includes elements. The resistances of the elements are varied according to pressure made by the clamp.