发明名称 APPARATUS FOR TRANSFERRING A SOLDER AND METHOD OF TRANSFERRING A SOLDER USING THE SAME
摘要 PURPOSE: A solder transfer device and a solder transfer method using the same are provided to transfer solders inserted into a template on an accurate location of a bump pad formed on a substrate, thereby increasing the quality of a semiconductor device. CONSTITUTION: A support part(100) supports a template(10) loaded from the outside. A pressurization unit(200) faces the support part. The pressurization unit absorbs a substrate(20) using vacuum power. A sensing unit(300) senses an offset load value applied to at least three spots of the support part. A pressure controller(400) controls the pressure between the support unit and the pressurization unit according to the offset load value.
申请公布号 KR101150672(B1) 申请公布日期 2012.05.25
申请号 KR20100058405 申请日期 2010.06.21
申请人 发明人
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
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