| 摘要 |
This invention relates to an evaporation source that elevates material filling density within a material container, a film formation apparatus, and a film formation method. The evaporation source includes: a material container for accommodating organic materials; a heating device for heating the organic materials accommodated in the material container; a pressurizing element that has a plane plate, in which there are a plurality of through holes formed on the plane plate, by means of the pressurizing plane of the plane plate to pressurize the organic materials ma accommodated in the material container, and to make the organic molecules heated and vaporized by the heating device pass the plurality of through holes; and an extension tube that alleviates the pressurizing force of the pressurizing element to the organic materials by means of the elastic force.
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