发明名称 Polishing pad dresser
摘要 <p>PURPOSE: A polishing pad dresser is provided to arrange a grinding particle cluster with small grinding particles on the external circle of a work surface and arrange a grinding particle cluster with large grinding particles on the internal circle of the work surface, thereby increasing the grinding resistance, cutting efficiency, and operation cycle of the dresser. CONSTITUTION: A work surface is arranged on a base plate(11). A fixing plate(13) is located on the work surface. A plurality of penetration holes(131) corresponding to grinding particle clusters(12) are arranged on the fixing plate. A grinding particle cluster is combined with the base plate. The grinding particle cluster is comprise at least one grinding particle(121).</p>
申请公布号 KR101147149(B1) 申请公布日期 2012.05.25
申请号 KR20100079712 申请日期 2010.08.18
申请人 发明人
分类号 H01L21/304;H01L21/306;B24B53/12 主分类号 H01L21/304
代理机构 代理人
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