摘要 |
<p>PURPOSE: A polishing pad dresser is provided to arrange a grinding particle cluster with small grinding particles on the external circle of a work surface and arrange a grinding particle cluster with large grinding particles on the internal circle of the work surface, thereby increasing the grinding resistance, cutting efficiency, and operation cycle of the dresser. CONSTITUTION: A work surface is arranged on a base plate(11). A fixing plate(13) is located on the work surface. A plurality of penetration holes(131) corresponding to grinding particle clusters(12) are arranged on the fixing plate. A grinding particle cluster is combined with the base plate. The grinding particle cluster is comprise at least one grinding particle(121).</p> |