| 摘要 |
PURPOSE: A probe and a method for manufacturing a probe card are provided to control the pitch of a probe to be minute by generating one or more probes by etching a wafer as like a patterned shape in an aligner. CONSTITUTION: A first probe(110a) is composed of a first probe tip part(112a), a second probe beam part(114a), and a first probe support part(116a). A second probe(110b) is composed of a first probe tip part(112b), a second probe beam part(114b), and a first probe support part(116b). The first and the second probe beam parts are located in one side of the first and the second probe tip parts. The first and the second probe support parts are located in the other side of the first and the second probe beam parts. A conductive thin film is formed on a bottom plane of the first and the second probe tip parts.
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