| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve a problem that a spin coater is wasteful with wax by collecting a waste liquid of wax, removing a foreign material therefrom, adding a solvent thereto, adjusting the viscosity thereof, and thus making the waste liquid of wax as reusable liquid wax. <P>SOLUTION: The solvent which is the same as a diluting solvent is used to dilute the waste liquid of wax and adjust the viscosity thereof. The spent waste wax is recycled by making it pass through a filtration filter for removing the foreign material. <P>COPYRIGHT: (C)2012,JPO&INPIT |
