发明名称 |
DROPLET APPLYING DEVICE AND DROPLET APPLYING METHOD |
摘要 |
<P>PROBLEM TO BE SOLVED: To improve coating quality by suppressing an occurrence of inferior coating. <P>SOLUTION: A droplet applying device 1 discharges droplets of a solution including volatile solvent, towards a coating surface of an object K to be coated to form a coating film of a prescribed pattern on the coating surface. The droplet applying device includes: a stage 2 on which the object K to be coated is placed; a coating head 5 for discharging the droplet of the solution from a discharge hole by the actuation of a driving element; a moving device 3 for moving the stage 2 and the coating head 5 relative to each other along the coating surface of the object K to be coated on the stage 2; and a control section 6 providing the driving element of the coating head 5 with a driving voltage necessary for discharging the droplet. When the stage 2 and the coating head 5 are moved relative to each other to discharge the droplet to the coating surface of the object K to be coated on the stage 2, the control section 6 increases a driving voltage for a prescribed number of discharge times from starting the discharge of the droplet by the coating head 5, more than a subsequent driving voltage after the prescribed number of discharge times and provides the driving element of the coating head 5 therewith. <P>COPYRIGHT: (C)2012,JPO&INPIT |
申请公布号 |
JP2012098337(A) |
申请公布日期 |
2012.05.24 |
申请号 |
JP20100243548 |
申请日期 |
2010.10.29 |
申请人 |
SHIBAURA MECHATRONICS CORP |
发明人 |
HIRANO AZUSA;TSURUOKA YASUJI |
分类号 |
G02B5/20;B05C5/00;B05D1/26;H01L21/027 |
主分类号 |
G02B5/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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