MONOLITHICALLY INTEGRATED MULTI-WAVELENGTH HIGH-CONTRAST GRATING VCSEL ARRAY

摘要

Multiple-wavelength VCSEL array apparatus and method having a high contrast grating (HCG) mirror which can be implemented on a single substrate in which only the dimensions of the HCG (e.g., duty cycle or the period) need be changed to alter the wavelength of a given VCSEL in response to changing the reflectivity phase of the HCG mirror. The HCG can be defined by any desired lithographic process. By using a broadband HCG mirror a large wavelength span over 100 nm is provided, such as covering the entire C-band. The HCG multi-wavelength VCSEL array enables single-transverse mode emission and polarization control and scalability with respect to wavelength.