VACUUM EXHAUST DEVICE CONNECTION STRUCTURE AND VACUUM EXHAUST SYSTEM

摘要

Provided is a connection structure for a vacuum exhaust device which is a connection structure for a plurality of vacuum exhaust devices. The plurality of vacuum exhaust devices each has: a casing that forms at least one pump chamber; and an air intake port and an exhaust port that are disposed in the casing and communicate with the pump chamber. The casings are directly connected such that the pump chambers for the plurality of vacuum exhaust devices are connected to each other. The connection structure: has a connection path that causes at least one air intake port in a first vacuum exhaust device among the plurality of vacuum exhaust devices to communicate with at least one exhaust port in a second vacuum exhaust device, and causes the air exhausted from the exhaust port in the second vacuum exhaust device to flow into the pump chamber in the first vacuum exhaust device via the air intake port in the first vacuum exhaust device; and comprises a connection unit arranged outside of each casing for the plurality of vacuum exhaust devices and connected to the casing of the first vacuum exhaust device and the casing of the second vacuum exhaust device.