| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a non-contact carrying pad having a strong suction force and reduced in noise. <P>SOLUTION: The non-contact carrying pad ejects a compressed gas to suck and hold a plate-like component. A flow path 4 is disposed almost vertically from an inlet port 2 disposed at the center of the carrying pad. An almost conical inner recessed circumferential surface is disposed from a central part of the carrying pad of the flow path to a bottom surface. An almost conical stud 8 is disposed against the inner recessed circumferential surface to form the flow path. The bottom surface of the carrying pad is formed toward an outer periphery in a smooth planar fashion. The compressed air passes through the flow path from the inlet port. A cross-sectional area of the flow path is narrowed from an end of the stud to an outlet port 6. The compressed gas is ejected from the outlet port through the flow path and led along the bottom surface from the outlet port to suck and hold the plate-like component. A diffuser 14 is disposed where an end face of an outer periphery of the bottom surface of the carrying pad is cut out in a tapered shape over an entire circumference. <P>COPYRIGHT: (C)2012,JPO&INPIT |
