| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a highly reliable semiconductor wafer housing container inspection apparatus which is formed in a compact size and correctly inspects cleanliness of a housing container housing a semiconductor wafer, and to provide an inspection method of the inspection apparatus. <P>SOLUTION: A semiconductor wafer housing container inspection apparatus includes a transfer robot 46 transferring a housing container, a container rotation unit 48 holding and rotating the housing container transferred by the transfer robot 46, a lid open/close unit 50 opening and closing a lid attached to an opening of the housing container, an inspection liquid supply unit 52 supplying inspection liquid to the interior of the housing container, a sampling unit 54 sampling the inspection liquid supplied to the interior of the housing container, and an inspection unit 56 inspecting cleanliness of the sampled inspection liquid. The container rotation unit 48 rotates the housing container to which the inspection liquid is supplied, and the sampling unit 54 samples the inspection liquid from the housing container after the rotation and supplies the inspection liquid to the inspection unit 56. <P>COPYRIGHT: (C)2012,JPO&INPIT |
