| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an imprint deice which is advantageous for being relatively positioned between a mold and a substrate, even if force accompanied with mold releasing acts on a frame. <P>SOLUTION: An imprint device 1 comprises: a mold holding portion 3 for holding a mold 2; a substrate holding portion 5 for holding a substrate 4; position measuring instruments 15 and 16 for carrying out relative positioning between the substrate 4 and the mold 3; a first frame 10 for supporting at least either one of the mold holding portion 3 or the substrate holding portion 5, and the position measuring instruments 15 and 16; an actuator 22 for making force in the opposite direction to force F<SB POS="POST">S</SB>acting on the first frame 10 by mold releasing act on the first frame 10; and a control portion 6 for controlling the actuator 22 to make the force in the opposite direction act on the first frame 10 simultaneously with the mold releasing. <P>COPYRIGHT: (C)2012,JPO&INPIT |
