| 摘要 |
<P>PROBLEM TO BE SOLVED: To manufacture by a simple production process. <P>SOLUTION: A micromirror 32 has a constitution that a hinge 25a is hidden below a mirror 14. To a center of a lower surface of the mirror 14, one end 16a of a support pillar 16 is connected. To the other end 16b of the support pillar 16, the hinge 25a having a long shape in a radial direction of the support pillar 16 is connected via a power point connector 26a. Between the one end 16a and the other end 16b, a supporting point member 28b is connected via a supporting point connector 29a. The other end 16b of the support pillar 16 is pressed in the radial direction by the supporting point connector 26a by utilizing thermal expansion of the hinge 25a so as to incline the mirror 14 at the one end 16a having the supporting point connector 29a as a supporting point. <P>COPYRIGHT: (C)2012,JPO&INPIT |
