| 发明名称 |
PHOTOLITHOGRAPHICALLY DEFINED CONTACTS TO CARBON NANOSTRUCTURES |
| 摘要 |
Methods for the fabrication of nanostructures, including nanostructures comprised of carbon nanotubes, and the nanostructures, devices, and assemblies prepared by these methods, are described. |
| 申请公布号 |
US2012129273(A1) |
申请公布日期 |
2012.05.24 |
| 申请号 |
US201013318682 |
申请日期 |
2010.05.07 |
| 申请人 |
JOHNSON, JR. ALAN T.;JONES RYAN A.;KHAMIS SAMUEL M.;THE TRUSTEES OF THE UNIVERSITY OF PENNSYLVANIA |
发明人 |
JOHNSON, JR. ALAN T.;JONES RYAN A.;KHAMIS SAMUEL M. |
| 分类号 |
H01L21/768;B82Y30/00;B82Y40/00;G03F7/004;G03F7/20;H01L21/00;H01L21/31 |
主分类号 |
H01L21/768 |
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