SEMICONDUCTOR DEVICE HAVING A SPLIT GATE AND A SUPER-JUNCTION STRUCTURE

摘要

A semiconductor device comprises a source region, a drain region, and a drift region between the source and drain regions. A split gate is disposed over a portion of the drift region, and between the source and drain regions. The split gate includes first and second gate electrodes separated by a gate oxide layer. A super-junction structure is disposed within the drift region between the gate and the drain region.